January 2023

Use the E5AR for cascade control. Input noise is mitigated.

Space saving is possible with the 4-point input of the E5AR. NS direct connections are possible. High-speed control at the sampling rate of 50 ms is possible.

Using the Remote SP (RSP) as the Set Value (SV) to equalize the temperature of the wafer.

The extra-narrow beam precisely detects minute bad marks.

Using cascade control and PID bank function to restrict the upper limit of the remote SP.

Register two SVs (one for idling, one for operation) in the Temperature Controller. Use buttons on the control panel to change all Temperature Controller settings during production.

Problems: Furnaces are located near power supply, so ambient operating temperature is 50°C, and a power supply with a greater capacity than normal is required (derating curve). The number of fans and capacity often changes. Use an S8TS Switching Power Supply that can be easily expanded in 660-W blocks. Respond quickly to sudden need for

The mirror reflection model inspects surface wobbling in mirror-finish objects at a resolution as high as 0.25 µm at the edge of the table, where the change is greatest.

This application uses a pipe-mounting Capacitive Liquid-level Sensor that is not affected by the color of the pipe, the color of the liquid, or foams on the liquid surface. This Sensor allows you to detect chemical liquid levels without being affected by the color of the pipe, the color of the liquid or foams on

K8AB-VS voltage relay is used to check battery voltage and its charge level.